JPH0164056U - - Google Patents
Info
- Publication number
- JPH0164056U JPH0164056U JP1987159819U JP15981987U JPH0164056U JP H0164056 U JPH0164056 U JP H0164056U JP 1987159819 U JP1987159819 U JP 1987159819U JP 15981987 U JP15981987 U JP 15981987U JP H0164056 U JPH0164056 U JP H0164056U
- Authority
- JP
- Japan
- Prior art keywords
- light source
- defect inspection
- screen
- surface defect
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 230000007547 defect Effects 0.000 claims description 5
- 238000007689 inspection Methods 0.000 claims description 5
- 230000005611 electricity Effects 0.000 claims 1
- 230000003068 static effect Effects 0.000 claims 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159819U JPH0164056U (en]) | 1987-10-19 | 1987-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159819U JPH0164056U (en]) | 1987-10-19 | 1987-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0164056U true JPH0164056U (en]) | 1989-04-25 |
Family
ID=31441356
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159819U Pending JPH0164056U (en]) | 1987-10-19 | 1987-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0164056U (en]) |
-
1987
- 1987-10-19 JP JP1987159819U patent/JPH0164056U/ja active Pending
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